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Copy pathDraw a Ellipse_array.lym
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Draw a Ellipse_array.lym
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<?xml version="1.0" encoding="utf-8"?>
<klayout-macro>
<description/>
<version/>
<category>pymacros</category>
<prolog/>
<epilog/>
<doc/>
<autorun>false</autorun>
<autorun-early>false</autorun-early>
<shortcut/>
<show-in-menu>false</show-in-menu>
<group-name/>
<menu-path/>
<interpreter>python</interpreter>
<dsl-interpreter-name/>
<text>#此程序利用KLayout的Python API 实现椭圆阵列的绘制
#使用方式：打开Klayout->Macros->Macro Development->Import file,
#修改参数或程序，更改程序末尾文件保存路径，运行程序，
#最后找到输出的文件使用KLayout打开即可
import pya #导入KLayout Python API
import math
#定义画椭圆函数,各参数含义分别为椭圆中心横坐标、纵坐标,半长轴,半短轴，点数，layer
def ellipse(x,y,a,b,n,layer):
pts = []
da = math.pi * 2 / n
for i in range(0,n):
pts.append(pya.Point.from_dpoint(pya.DPoint(x+a * math.cos(i * da), y+b * math.sin(i * da))))
#使用多边形类画椭圆
top.shapes(layer).insert(pya.Polygon(pts))
def pellipse(x,y,a,b,npoints,layer_index):
# locate the Basic library
lib = pya.Library.library_by_name("Basic")
if lib == None:
raise Exception("Unknown lib 'Basic'")
# locate the declaration
pcell_decl = lib.layout().pcell_declaration("ELLIPSE");
if pcell_decl == None:
raise Exception("Unknown PCell 'ELLIPSE'")
# create the PCell variant
param = {
"radius_x": a/1000,
"radius_y": b/1000,
"actual_radius_x": a/1000,
"actual_radius_y": b/1000,
"npoints": npoints,
"layer": pya.LayerInfo(layer_index, 0)
}
pv = []
for p in pcell_decl.get_parameters():
if p.name in param:
pv.append(param[p.name])
else:
pv.append(p.default)
cell_index = layout.add_pcell_variant(lib, pcell_decl.id(), pv)
# place the PCell
t = pya.Trans(pya.Trans.R0, x, y)
top.insert(pya.CellInstArray(cell_index, t))
#新建layout、cell、layer
layout = pya.Layout()
top = layout.create_cell("TOP")
l1 = layout.layer(1, 0)
l2 = layout.layer(2, 0)
a_min=500 #最小半长轴（单位:nm,下同）
a_max=1500 #最大半长轴
a_step=25 #半长轴变化步长
b_min=1000 #最小半短轴
b_max=2000 #最大半短轴
b_step=50 #半短轴变化步长
array_m=5 #阵列横向微柱数量
array_n=4 #阵列纵向微柱数量
plliar_distance=20e3 #微柱间距
array_distance=110e3 #阵列间距
#ai,bi遍历微柱半长轴、半短轴变化序列
for ai in range((a_max-a_min)//a_step):
for bi in range((b_max-b_min)//b_step):
#此循环用于画每个小阵列第一排的五个圆
for circle in range(5):
if circle<3: #把五个圆分别画在两个layer上
layer_index=2
else:
layer_index=1
circle_x=ai*array_distance+circle*plliar_distance
circle_y=-bi*array_distance+plliar_distance
circle_r=4500-1000*circle #圆的尺寸序列直接写进来了
pellipse(circle_x, circle_y,circle_r,circle_r,100,layer_index)
#i,j遍历微柱参数相同的小阵列
for i in range(0,array_m):
for j in range(0,array_n):
ellipse_x=ai*array_distance+i*plliar_distance
ellipse_y=-bi*array_distance-j*plliar_distance
ellipse_a=a_min+ai*a_step
ellipse_b=b_min+bi*b_step
pellipse(ellipse_x,ellipse_y,ellipse_a,ellipse_b,100,1)
#保存为.GDS文件
layout.write("E:\\Research\\Nanofab\\Pattern\\Ellipse_array.GDS")
</text>
</klayout-macro>