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Example 02 - Alignment and ImagesLib.py
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Example 02 - Alignment and ImagesLib.py
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# -*- coding: utf-8 -*-
"""
ASML_JobCreator - Example 02
Alignment and advanced options.
Multi-layer job, multiple images per layer, with marks exposure and subsequent alignment to those marks.
Also shows usage of predefined Images from files in ASML_JobCreator/Images/ directory.
@author: Demis D. John
Univ. of California Santa Barbara
UCSB Nanofabrication Facility: http://www.nanotech.ucsb.edu
2020-05-14
All units are in millimeters.
Coordinates and sizes are specified as two-valued iterables like [X,Y]
All sizes and shifts are specified at 1x wafer-scale (NOT 4x/5x reticle-scale)
For help: after running once, use commands like:
help( asml )
help( MyJob )
dir( MyJob.Cell )
help( MyJob.Cell.set_CellSize )
"""
####################################################
# Module setup etc.
import ASML_JobCreator as asml
####################################################
print('Running...')
MyJob = asml.Job()
MyJob.set_comment("Demo Alignment Job", "", "Exported from Python ASML_JobCreator")
## Cell Structure:
MyJob.Cell.set_CellSize( [5.00, 5.00] ) # cell size [X,Y] in millimeters
MyJob.unset_ExposeEdgeDie() # set/unset (on/off) Expose die that fall only partially on the wafer
MyJob.Cell.set_RoundEdgeClearance( 0 ) # Width of disallowed border of wafer
MyJob.Cell.set_FlatEdgeClearance( 0 ) # Width of disallowed border at wafer flat
## Image Definition:
# MyJob.Image( <ImageID>, <ReticleID_Barcode>, sizeXY=coords, shiftXY=coords)
## To expose on Layer 1:
# Resolution test structures:
Res = MyJob.Image("UCSB_Res", "UCSB-OPC1", sizeXY=[3, 3], shiftXY=[4,5])
## To expose on Layer 2:
# We'll use a pre-defined image from file, in the sub-folder ASML_JobCreator/Images/SPM_X.py
# `dir( asml.Images )` will show you a list, or look inside the sub-folder.
# You can place your own Image Library files into the Images subfolder.
# We'll place X-scribe-line alignment marks, used as dicing alignment guides
DicingLine_X = MyJob.Image( asml.Images.SPM_X )
# In order to use alignment mark images for other purposes, must give a custom Image ID, otherwise it thinks it's an SPM-X alignment mark:
DicingLine_X.set_ImageID( "DiceX" )
## Image Distribution
# cellCR is integer pair of Col/Row specificiation
# shiftXY is floating-point X/Y shift
## To expose on Layer 1:
# Distribute Image "Res" across whole wafer
for cells in MyJob.Cell.get_ValidCells():
Res.distribute( cells )
#end for(cells)
## To expose on Layer 2:
# Distribute DicingX in rows across wafer, on top and bottom of cells:
for r in [-2,+1]:
for c in range(-8,+9):
DicingLine_X.distribute( [c,r], shiftXY=[0,+2.5] ) # top of cell
DicingLine_X.distribute( [c,r], shiftXY=[0,+2.5] ) # bottom of cell
#end for(c)
#end for(r)
## Alignment Mark Definition
E = MyJob.Alignment.Mark("E", "PM", waferXY=[42.5, 0.0])
EN = MyJob.Alignment.Mark("EN", "PM", waferXY=[42.5, 2.5])
ES = MyJob.Alignment.Mark("ES", "PM", waferXY=[42.5, -2.5])
W = MyJob.Alignment.Mark("W", "PM", waferXY=[-42.5, 0.0])
WN = MyJob.Alignment.Mark("WN", "PM", waferXY=[-42.5, 2.5])
WS = MyJob.Alignment.Mark("WS", "PM", waferXY=[-42.5, -2.5])
ALL = MyJob.Alignment.Strategy("ALL", marks=[E, EN, ES, W, WN, WS])
ALL.set_required_marks(2) # num marks that must pass, defaults to all
## Layer Definition & Reticle Data -
# Add Zero layer, with alignment mark exposure
ZeroLyr = MyJob.Layer() # Empty blank Layer
ZeroLyr.set_ZeroLayer() # Sets as special system-layer for alignment marks
ZeroLyr.expose_Marks( marks=[E, EN, ES, W, WN, WS], Energy=21, Focus=-0.10 ) # set Marks Exposure.
# Layer 1 - combine with Zero layer alignment mark exposure
Lyr1 = MyJob.Layer( LayerID="Lyr1" )
Lyr1.set_CombineWithZeroLayer()
Lyr1.expose_Image( Res, Energy=21, Focus=-0.10 )
# Layer 2 - Aligns to ZeroLayer
Lyr2 = MyJob.Layer( LayerID="Lyr2" )
Lyr2.set_PreAlignment( marks=[E, W] ) # choose 2 marks
Lyr2.set_GlobalAlignment( strategy=ALL ) # choose a global strategy
Lyr2.expose_Image( DicingLine_X, Energy=21, Focus=-0.10 )
# Print all the data added to this Job:
print(MyJob)
MyJob.Plot.plot_wafer()
## Export the text file:
asml.unset_WARN() # Turn off warning messages about defaults
asml.set_DEBUG() # Turn on debugging output.
# overwrite the file. A warning will be printed while doing so.
MyJob.export('Example02.txt', overwrite=True)
print('done.')