diff --git a/.circleci/config.yml b/.circleci/config.yml
index a2b88b69..045a381f 100644
--- a/.circleci/config.yml
+++ b/.circleci/config.yml
@@ -215,7 +215,7 @@ workflows:
           name: package-<< matrix.arch >>
           matrix:
             parameters:
-              arch: [linux-x64-glibc, darwin-x64-unknown, win32-x64-unknown]
+              arch: [linux-x64-glibc, darwin-x64-unknown, darwin-arm64-unknown, win32-x64-unknown]
       - package:
           filters: *filter-only-master
           requires:
@@ -234,6 +234,7 @@ workflows:
             - build
             - package-linux-x64-glibc
             - package-darwin-x64-unknown
+            - package-darwin-arm64-unknown
             - package-win32-x64-unknown
             - package-linux-x64-glibc-no-chromium
           filters: *filter-only-master
@@ -260,7 +261,7 @@ workflows:
           name: package-<< matrix.arch >>
           matrix:
             parameters:
-              arch: [linux-x64-glibc, darwin-x64-unknown, win32-x64-unknown]
+              arch: [linux-x64-glibc, darwin-x64-unknown, darwin-arm64-unknown, win32-x64-unknown]
               skip_signing_errors: [true]
 
       - package:
diff --git a/scripts/download_chromium.js b/scripts/download_chromium.js
index 53e1ddd3..a81ce8c0 100644
--- a/scripts/download_chromium.js
+++ b/scripts/download_chromium.js
@@ -2,6 +2,7 @@ const path = require('path');
 const child_process = require('child_process');
 const Puppeteer = require('puppeteer');
 const { PUPPETEER_REVISIONS } = require('puppeteer/lib/cjs/puppeteer/revisions')
+const fs = require('fs')
 
 const archArg = process.argv[2];
 let [
@@ -37,7 +38,21 @@ browserFetcher
 
     let execPath = parts.join(path.sep);
 
-    child_process.execSync(`cp -RP ${execPath} ${outputPath}`);
+    if (platform === 'mac' && arch === 'arm64') {
+        // follow symlinks, dereference symlinks and copy them as files
+        child_process.execSync(`cp -LR ${execPath} ${outputPath}`);
+
+        const dsStore = '.DS_Store'
+        const dsStorePaths = [`${outputPath}/${dsStore}`, `${outputPath}/${parts[parts.length - 1]}/.DS_Store`]
+        for (const path of dsStorePaths) {
+            if (!fs.existsSync(path)) {
+                child_process.execSync(`touch ${path}`)
+            }
+        }
+    } else {
+        // follow symlinks, copy them as symlinks
+        child_process.execSync(`cp -RP ${execPath} ${outputPath}`);
+    }
 
     console.log(`Chromium moved from ${execPath} to ${outputPath}/`);
     process.exit(0);