diff --git a/onnxruntime/core/providers/webgpu/math/binary_elementwise_ops.cc b/onnxruntime/core/providers/webgpu/math/binary_elementwise_ops.cc
index 9d9eff2ccdde5..8feb5daae3f55 100644
--- a/onnxruntime/core/providers/webgpu/math/binary_elementwise_ops.cc
+++ b/onnxruntime/core/providers/webgpu/math/binary_elementwise_ops.cc
@@ -277,7 +277,7 @@ WEBGPU_BINARY_VERSIONED_KERNEL(Sub, 7, 12, Sub, WebGpuSupportedNumberTypes())
 WEBGPU_BINARY_VERSIONED_KERNEL(Sub, 13, 13, Sub, WebGpuSupportedNumberTypes())
 WEBGPU_BINARY_KERNEL(Sub, 14, Sub, WebGpuSupportedNumberTypes())
 
-WEBGPU_BINARY_IMPL(Pow, "output_value_t(pow(output_value_t(a), output_value_t(b)))")
+WEBGPU_BINARY_IMPL(Pow, "output_value_t(pow(vec4<f32>(a), vec4<f32>(b)))")
 WEBGPU_BINARY_VERSIONED_KERNEL(Pow, 7, 11, Pow, WebGpuSupportedNumberTypes())
 WEBGPU_BINARY_VERSIONED_KERNEL_2(Pow, 12, 12, Pow, WebGpuSupportedNumberTypes(), WebGpuSupportedNumberTypes())
 WEBGPU_BINARY_VERSIONED_KERNEL_2(Pow, 13, 14, Pow, WebGpuSupportedNumberTypes(), WebGpuSupportedNumberTypes())