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layout: post | ||
title: "Manufacturing By Atomic Functional Structuring" | ||
title: "Nanofabrication And Atomic Functional Structuring" | ||
date: 2024-03-01 4:30:00 | ||
categories: classics | ||
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Like it's done with DNA/RNA ... in living cells | ||
Here is a proposed 200-module, year-long nanofabrication course for autodidacts, designed to complement Sam Zeloof's AtomicSemi fab venture and the ZeroToASIC course: | ||
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Fundamentals (50 modules): | ||
1-10: Introduction to Semiconductors and Devices | ||
11-20: Solid State Physics and Quantum Mechanics | ||
21-30: Crystallography and Materials Science | ||
31-40: Cleanroom Protocols and Safety | ||
41-50: Vacuum Systems and Plasma Physics | ||
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Lithography (30 modules): | ||
51-60: Optical Lithography and Photoresists | ||
61-70: Electron Beam Lithography | ||
71-75: Nanoimprint Lithography | ||
76-80: Advanced Lithography Techniques | ||
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Thin Film Deposition (30 modules): | ||
81-90: Physical Vapor Deposition (PVD) | ||
91-100: Chemical Vapor Deposition (CVD) | ||
101-105: Atomic Layer Deposition (ALD) | ||
106-110: Electrochemical Deposition | ||
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Etching and Patterning (30 modules): | ||
111-120: Wet Chemical Etching | ||
121-130: Dry Etching (RIE, ICP, etc.) | ||
131-135: Lift-off Processes | ||
136-140: Nanoscale Patterning Techniques | ||
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Characterization and Metrology (30 modules): | ||
141-150: Optical Microscopy and Spectroscopy | ||
151-160: Electron Microscopy (SEM, TEM) | ||
161-165: Atomic Force Microscopy (AFM) | ||
166-170: Electrical Characterization Techniques | ||
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Process Integration and Device Fabrication (30 modules): | ||
171-180: CMOS Process Flow | ||
181-185: MEMS and Sensor Fabrication | ||
186-190: Photonic Device Fabrication | ||
191-195: Quantum Device Fabrication | ||
196-200: Advanced Packaging and 3D Integration | ||
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The course begins with a strong foundation in semiconductor physics, materials science, and cleanroom practices. Students will gain hands-on experience with various micro and nanofabrication equipment, including those used in Sam Zeloof's AtomicSemi fab. | ||
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Lithography modules cover both conventional and advanced techniques, with an emphasis on electron beam lithography to align with AtomicSemi's capabilities. Thin film deposition and etching modules provide a comprehensive overview of key processes in device fabrication. | ||
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Characterization and metrology modules familiarize students with essential tools for analyzing and optimizing fabrication processes. The course culminates with process integration and device fabrication modules, covering a range of application areas. | ||
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To complement the ZeroToASIC course, specific modules on CMOS process flow and the use of open-source PDKs and ASIC tools can be included. Students will learn to design and simulate their own ASICs using these resources and gain an understanding of the fabrication process behind them. | ||
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Throughout the course, students will work on practical projects that reinforce their learning and develop their skills in nanofabrication. Collaboration with the AtomicSemi fab and the ZeroToASIC community will provide opportunities for knowledge sharing and real-world application of course concepts. | ||
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By the end of this comprehensive program, autodidacts will have a strong foundation in nanofabrication and the ability to design and fabricate their own devices using cutting-edge open-source tools and resources. |